Surprisingly early -- and slightly creepy -- parametric facial animation created at the University of Utah in 1974(!).
Update: I'd initially reported this as having been created in 1972, the date given on the SIGGRAPH reel. YouTube user 'rarevision' informs me that the book "Handbook of Virtual Humans" more likely dates this from 1974. The earlier date might've been confused with another film by Ed Catmull and Fred Parke at the University of Utah. That film can be sen here: